General information

URL

http://data.mendeley.com/datasets/w99w5ythw8/8/files/b8994e8f-a4f6-403a-b7c0-1d2f47cdd69e/SiC_110_HeDT_SBE_TRIM.SP.dat?dl=1

Reference this file

Cite this dataset

Bringuier, Stefan; Abrams, Tyler; Rudakov, Dmitry; Unterberg, Ezekial; Holland, Leo; Vasudevamurthy, Gokul; Guterl, Jerome (2019), “Data for: Atomic Insight Into Concurrent He, D, and T Sputtering and Near-Surface Implantation of 3C-SiC Crystallographic Surfaces”, Mendeley Data, v8 http://dx.doi.org/10.17632/w99w5ythw8.8#file-3e71204c-cca3-4c1b-8389-82d896a19362

dat SiC_110_HeDT_SBE_TRIM.SP.dat