#Histogram of Helium implantation in SiC (110) surface. #Total particle flux of 4.0e27 m^-2 s^-1 (fluence ~10e19 m^-2). Composition of incident flux ratio of particles was 1:10:10 He:D:T #Bin size: 5.3 Angstroms #Bin-Center[Angstroms] He-Count 0.65 0 5.95 0 11.25 0 16.55 0 21.85 10 27.15 10 32.45 10 37.75 10 43.05 5 48.35 15 53.65 5 58.95 35 64.25 10 69.55 10 74.85 5 80.15 5 85.45 0 90.75 25 96.05 20 101.35 15 106.65 20 111.95 15 117.25 15 122.55 20 127.85 30 133.15 25 138.45 25 143.75 0 149.05 0 154.35 0 159.65 0 164.95 0 170.25 0 175.55 0 180.85 0 186.15 0 191.45 0 196.75 0 202.05 0 207.35 0