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Dera, Wojciech Data for: Development of a novel nickel-based metal force microsensor using bottom-up approach Mendeley Data Measurement data behind the results of the article "Development of a novel nickel-based metal force microsensor using bottom-up approach" (W.J. Dera, H. Konopacka, D.M. Jarząbek, Precision Engineering 95 (2025) 251-261, https://doi.org/10.1016/j.precisioneng.2025.05.003). The sensor is a capacitive comb force microsensor made of nanocrystalline nickel by electrodeposition into a photoresist mould (bottom-up process). The dataset contains: - force-capacitance calibration (Fig. 7, Eq. 7): raw force of the reference transducer, raw AD7746 capacitance codes and every processing step (pairing, taring, time alignment, resampling, 5-sample moving average, trimming, linear fit); - force-displacement points used to determine the spring constant (Fig. 8a, Eq. 8); - capacitance drift under a constant load of about 2 N (Fig. 8b), raw codes and values in pF; - stability records of the reference force transducer at 1 N and 2 N (Fig. 9); - the screen capture of the capacitance anomaly between 3 and 5 N (Fig. 11) and microscope photographs of the out-of-plane rib deflection (Fig. 12); - the image files of all twelve figures of the article. README.txt describes every file, the columns and units, the instruments and the processing steps. Nickel Sensor Microelectromechanical System Sensor Electrodeposition of Metals Instrument Calibration Konopacka, Hanna Jarząbek, Dariusz Dataset doi:10.17632/syjkdyzmxj.1 oai:data.mendeley.com/syjkdyzmxj.1 Creative Commons Attribution 4.0 International http://creativecommons.org/licenses/by/4.0 https://data.mendeley.com/datasets/syjkdyzmxj 2026-09-29T13:02:42Z