RSD2013_v3/SiMTra_v2.2 - Simulation files of the examples in 'Modeling reactive magnetron sputtering: Opportunities and challenges'
Description
A set of input files for the simulation software RSD2013 v3 and SiMTra v2.2 which generate the data used for the figures in the paper 'Modeling reactive magnetron sputtering: opportunities and challenges', published in Thin Solid Films (Elsevier) DOI:10.1016/j.tsf.2019.05.045. Also the set of experimental data for the current-voltage-pressure curves are included. Four examples are illustrated by simulation: 1) Redeposition of sputtered atoms - (SiMTra) Figure 1: Influence of working (Ar) pressure and the sputtered element (Li, Al, Ti, Y, Ta) on the fraction of sputtered material redeposited on the target. - (RSD/SiMTra) Figure 2a: Hysteresis behaviour of reactive pressure afo reactive flow, varying the redeposition fraction of the sputtered material Al. - (RSD/SiMTra) Figure 2b: Comparison of the critical points behaviour afo the redeposition fraction with a reduction of the sputter yield. 2) IV-characteristics - (RSD/SiMTra) Figure 3a: IV-characteristic of a simplified Ti/O2 system (only one oxidation state). - (RSD/SiMTra) Figure 3a: IV-characteristic of an Al/O2 system. - (Experimental) Figure 4: Experimental IVP-characteristics fo an Al/O2 system. 3) Sample rotation - (RSD/SiMTra) Figure 6a: Behaviour of the critical points afo the rotation speed of a substrate plate. - (RSD/SiMTra) Figure 6b: Time evolution of the reactive gas pressure for two rotation speeds of the substrate plate. 4) Pulsing discharge current - (RSD/SiMTra) Figure 7a: Behaviour of the critical points afo the pulsing frequency of the current. - (RSD/SiMTra) Figure 7b: Time evolution of the target state by pulsing the current.
Files
Steps to reproduce
1) Download the RSD2013 v3 software package (which includes the SiMTra v2.2) on www.draft.ugent.be under the Software section or via the DOI link (10.13140/RG.2.2.25824.94723). 2) Unpack the RSD2013 v3 software package where the SiMTra v2.2 software will be in a subdirectory of the RSD2013 main directory. 3) Download "RSD_examples.zip" to the RSD2013 main directory (where the RSD2013.exe executable is located) and unzip the content here. 4) Download "SiMTra_examples" to the simtra_v2.2 directory under the RSD2013 main directory and unzip the content here. 5) For the RSD simulations: - Open the RSD2013_GUI.exe for the RSD simulations and load the desired main input file(s) located in the subdirectories of INPUT. The possible main RSD input files are listed in 'list_of_RSD2013_inputs.txt'. 6) For the SiMTra simulations: - Open the simtra_gui.exe for the SiMTra simulations and load the desired input file located in the subdirectory of INPUT under the simtra_v2.2 directory. The possible simtra input files are listed in 'list_of_SiMTra_inputs.txt'.