Subroutines for some plasma surface interaction processes: physical sputtering, chemical erosion, radiation enhanced sublimation, backscattering and thermal evaporation

Published: 15-06-2004| Version 1 | DOI: 10.17632/329fxb9zn7.1
Manoj Warrier,
Ralf Schneider,
Xavier Bonnin


Abstract A suite of FORTRAN subroutines/functions to generate data using empirical formulas for physical sputtering of mono-atomic targets for any elemental incident ion (atom), chemical erosion of graphite, Radiation Enhanced Sublimation (RES) of graphite, the number and energy backscattering coefficients for any elemental incident ion (atom) on a compound target and thermal evaporation of graphite is presented. Since chemical erosion, RES and thermal evaporation depend on the surface temperature of ... Title of program: Plasma Surface Interaction Codes (PSIC) Catalogue Id: ADTR_v1_0 Nature of problem 0-D plasma surface interaction model used to demonstrate calls to subroutines for physical sputtering yield, chemical erosion yield of graphite, RES of graphite, backscattering coefficients, thermal evaporation of graphite and 1-D heat diffusion in graphite. Versions of this program held in the CPC repository in Mendeley Data ADTR_v1_0; Plasma Surface Interaction Codes (PSIC); 10.1016/j.cpc.2004.02.011 This program has been imported from the CPC Program Library held at Queen's University Belfast (1969-2018)