Langmuir probe RF plasma compensation using a simulation method

Published: 01-01-2014| Version 1 | DOI: 10.17632/3wmvbfwm4f.1
Aasim Azooz,
Y.A. Al- Jawaady,
Z.T. Ali


Abstract The problem of Langmuir probe data deformation due to RF pickup by the probe is treated through a computer simulation method. It is pointed out that proper RF compensations can be obtained by treatment of the Langmuir probe raw data through the use of computer software. It is demonstrated that correct, RF unaffected probe I – V characteristics can be accurately reproduced from the RF contaminated data. This eliminates the need for the use of any filters or other hardware procedures. User frie... Title of program: RF Compensation Catalogue Id: AEQR_v1_0 Nature of problem In RF plasma Langmuir probe diagnostics, the probe I-V characteristics obtained experimentally does nor represent the true I-V. This is because the probe picks up some RF plasma voltage which modulates the applied bias voltage and causes a current flow that corresponds the RF affected bias rather that the actual DC bias. This if untreated, can lead false results for the values of plasma parameters derived from the obtained I-V. Several hardware based methods are used to perform such correction ( ... Versions of this program held in the CPC repository in Mendeley Data AEQR_v1_0; RF Compensation; 10.1016/j.cpc.2013.09.003 This program has been imported from the CPC Program Library held at Queen's University Belfast (1969-2018)