Analysis of spectroscopic ellipsometric measurements

Published: 01-01-1992| Version 1 | DOI: 10.17632/5zzm6yjwd7.1
M.H.W. Verbruggen,
J.M.M. de Nijs


Abstract In recent years spectroscopic ellipsometry has been succesfully to non-destructive characterize multi-layer materials and to monitor surface processes as a function of time. The extraction of the relevant parameters of these samples from the spectroscopic data requires extensive computer analysis. For this purpose the sample is described by means of a stratified-layer theory in combination with an effective medium approximation. The computer program presently discussed performs this analysis ... Title of program: CENTIPEDE Catalogue Id: ACGG_v1_0 Nature of problem The reflection of light at a surface strongly depends on the structural and chemical properties of the surface. Structural features often have a layer-like nature. The chemical properties of the different layers are reflected in the dielectric function that is used for the description of the solid state involved. Mixed layers containing two or more distinguishable compounds, e.g. microcrystallites in a matrix, make part of the problem. Generally, a model in terms of a number of (mixed) layers wi ... Versions of this program held in the CPC repository in Mendeley Data ACGG_v1_0; CENTIPEDE; 10.1016/0010-4655(92)90140-T This program has been imported from the CPC Program Library held at Queen's University Belfast (1969-2019)