The effects of match circuit on the breakdown process of capacitively coupled plasma driven by radio frequency

Published: 29 April 2022| Version 1 | DOI: 10.17632/6xpd59sgkv.1
Hao Wu


1. This code is written as.f90 which can be compiled with OneAPI of Intel or other compilers. 2. The elements of the L-Type circuit are included in the file of "LTypeExternalCircuit.f90". 3. The voltage of rf power can be changed in the file of "FieldBoundary.f90". 4. The time and space step can be changed in the file of "ControlFlow.f90" 5. The initial density, the total simulation time can be controlled by changing those parameter values in "input/ControlFlow.txt" 6. The gas pressure and the initial temperature can be changed in the file "input/gas.txt". 7. The content of the part of the output data has been described in the file named "Description.txt" in "1DPICMCCLTypeECBreakdown(clean2) -"



Huazhong University of Science and Technology


Plasma, Plasma Simulation