STRUCTURE and CONTENT of 64Zn+ ION HOT IMPLANTED and THERMAL OXIDATED Si

Name: STRUCTURE and CONTENT of 64Zn+ ION HOT IMPLANTED and THERMAL OXIDATED Si
Creator: Vladimir Privezentsev
Published: 2016-12-31T14:57:57.468Z
Keywords: Applied Physics

Privezentsev, Vladimir; Kirilenko, Elena; Goryachev, Andrei

doi:10.17632/9t367gc4xd.1

STRUCTURE and CONTENT of 64Zn+ ION HOT IMPLANTED and THERMAL OXIDATED Si

Published: 31-12-2016| Version 1 | DOI: 10.17632/9t367gc4xd.1

Contributors:

Vladimir Privezentsev,

Elena Kirilenko,

Andrei Goryachev

Description

Ion implantation formation of Zn and ZnO nanoparticles in solid-state matrices

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