STRUCTURE and CONTENT of 64Zn+ ION HOT IMPLANTED and THERMAL OXIDATED Si

Published: 31 December 2016| Version 1 | DOI: 10.17632/9t367gc4xd.1
Contributors:
Vladimir Privezentsev,
Elena Kirilenko,
Andrei Goryachev

Description

Ion implantation formation of Zn and ZnO nanoparticles in solid-state matrices

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Research and development

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Applied Physics

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