Dataset on RF magnetron sputtering of TiC on commercially pure Titanium

Published: 12 Jan 2020 | Version 1 | DOI: 10.17632/c25mgp6ptz.1

Description of this data

The planar morphology and topography of TiC thin films coated on commercially pure Titanium (CpTi) grown by RF magnetron sputtering were investigated using Field emission scanning electron microscope (FESEM) and Atomic force microscope (AFM). The mechanical properties such as Hardness and Young Modulus of the thin film coating was studied using Nanohardness. Furthermore, grazing incidence X-ray diffractometer (GIXRD) and Raman spectroscopy were used to analyse the structural and composition of the TiC thin film coating

Experiment data files

  • Dataset on microstructural, structural and tribology characterization of TiC thin film on CpTi substrate grown by RF Magnetron Sputtering
    • GIXRD Data file
    • Nanohardness
    • Raman

Latest version

  • Version 1


    Published: 2020-01-12

    DOI: 10.17632/c25mgp6ptz.1

    Cite this dataset

    Abegunde, Olayinka (2020), “Dataset on RF magnetron sputtering of TiC on commercially pure Titanium”, Mendeley Data, v1


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University of Johannesburg


Engineering, Thin Film, Magnetron Sputtering


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