Dataset on RF magnetron sputtering of TiC on commercially pure Titanium

Published: 12 January 2020| Version 1 | DOI: 10.17632/c25mgp6ptz.1
Contributor:
Olayinka Abegunde

Description

The planar morphology and topography of TiC thin films coated on commercially pure Titanium (CpTi) grown by RF magnetron sputtering were investigated using Field emission scanning electron microscope (FESEM) and Atomic force microscope (AFM). The mechanical properties such as Hardness and Young Modulus of the thin film coating was studied using Nanohardness. Furthermore, grazing incidence X-ray diffractometer (GIXRD) and Raman spectroscopy were used to analyse the structural and composition of the TiC thin film coating

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Institutions

University of Johannesburg

Categories

Engineering, Thin Film, Magnetron Sputtering

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