Data for: Surface morphology evolution of a polycrystalline diamond by inductively coupled plasma reactive ion etching (ICP-RIE)

Published: 29 Jun 2019 | Version 1 | DOI: 10.17632/dmzhyn59ny.1
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Description of this data

XRD spectra of the original and O2 plasma etched PCD2. After etching at RFP of 100W, I<111>/<110>, which is the peak intensity ratio of the <111> and <110> orientation, decreases from 0.904 to 0.332. This demonstrates that the <111> crystal orientation of etched PCD exhibits weaker intensity and becomes less dominant in XRD diffraction content after etching. This was due to preferential etching /oxidation of the <111> orientation compared with other crystal orientations, which agrees with existing literature. However, after subsequent etching at RFP of 400W, I<111>/<110> decreases slightly from 0.332 to 0.235. This minor change occurred owing to the dominant role of ion-bombardment enhanced etching when the RFP was as high as 400W, which surpassed the reactive selective etching on crystal orientations.

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This data is associated with the following publication:

Surface morphology evolution of a polycrystalline diamond by inductively coupled plasma reactive ion etching (ICP-RIE)

Published in: Materials Letters

Latest version

  • Version 1

    2019-06-29

    Published: 2019-06-29

    DOI: 10.17632/dmzhyn59ny.1

    Cite this dataset

    li, chengming (2019), “Data for: Surface morphology evolution of a polycrystalline diamond by inductively coupled plasma reactive ion etching (ICP-RIE)”, Mendeley Data, v1 http://dx.doi.org/10.17632/dmzhyn59ny.1

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X-Ray Diffraction

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