Enhancement of the sensing properties through chemical-etched surface texturing
Published: 21 April 2022| Version 2 | DOI: 10.17632/hxsfc3y75x.2
Contributor:
Weverton Alison dos Santos SilvaDescription
Recently, different studies have demonstrated that nanostructured ZnO-based devices exhibit improved efficiency by chemical etched surface texturing using diluted hydrochloric acid (HCl) solutions. In this context, this study investigates the influence of chemical etching by HCl on the gas-sensing properties of ZnO thin films regarding ozone (O3) detection.
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Institutions
Universidade de Sao Paulo
Categories
ZnO, Gas Sensor, Radio Frequency Sputtering, Surface Texture