Enhancement of the sensing properties through chemical-etched surface texturing

Published: 21 April 2022| Version 2 | DOI: 10.17632/hxsfc3y75x.2
Contributor:
Weverton Alison dos Santos Silva

Description

Recently, different studies have demonstrated that nanostructured ZnO-based devices exhibit improved efficiency by chemical etched surface texturing using diluted hydrochloric acid (HCl) solutions. In this context, this study investigates the influence of chemical etching by HCl on the gas-sensing properties of ZnO thin films regarding ozone (O3) detection.

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Institutions

Universidade de Sao Paulo

Categories

ZnO, Gas Sensor, Radio Frequency Sputtering, Surface Texture

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