Data for: Effect of Si/O doping on the thermal stability of non-bonded hydrogenated diamondlike carbon coatings

Published: 5 July 2019| Version 1 | DOI: 10.17632/jn9p8k7xvs.1
Contributor:
Jihua Peng

Description

Effect of Si, O and H on the structure and mechanical peroperties of diamond like carbon films.

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