Monte Carlo simulations of the transport of sputtered particles

Published: 01-01-1999| Version 1 | DOI: 10.17632/jytj9t69b7.1
Karol Macàk,
Peter Macàk,
Ulf Helmersson


Abstract Program SPATS models the transport of neutral particles during magnetron sputtering deposition. The 3D Monte Carlo simulation provides information about spatial distribution of the fluxes, density of the sputtered particles in the chamber glow discharge area, and kinetic energy distribution of the arrival flux. Collision events are modelled by scattering in Biersack's potential, Lennard-Jones potential, or by binary hard sphere collision approximation. The code has an interface for Monte Carl... Title of program: SPATS Catalogue Id: ADKN_v1_0 Nature of problem Simulation of the transport of neutral sputtered particles during magnetron sputter deposition. Sputtered particles, that have an initial energy of several eV, are scattered by collisions with inert gas atoms and their energy and direction is affected before arriving to a surface. This process is dependent on system geometry, pressure, etc. The program provides information about spatial distribution of the fluxes towards surfaces in the chamber, density of sputtered particles in the glow dischar ... Versions of this program held in the CPC repository in Mendeley Data ADKN_v1_0; SPATS; 10.1016/S0010-4655(99)00245-3 This program has been imported from the CPC Program Library held at Queen's University Belfast (1969-2018)