Nanoindentation Analysis on Influence of Sputtering Power on Mechanical Properties of Tungsten and Tungsten – Tantalum Thin Films

Published: 24-02-2020| Version 1 | DOI: 10.17632/myzt9r8bns.1
Contributor:
s lakshmi kanth konuru

Description

Nanoindentation data of W and W-Ta thin films

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