Properties of SiC and Si3N4 Thin Films Containing Self-Assembled Gold Nanoparticles

Published: 26 September 2022| Version 1 | DOI: 10.17632/n298gcwbrf.1
Contributor:
Maja Mičetić

Description

The data describes the properties of SiC+Au and Si3N4Si3N4+Au thin films prepared by magnetron sputtering deposition followed by thermal annealing. The influence of gold addition on the optical and electrical properties is explored.

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Institutions

  • Institut Ruder Boskovic
  • Elettra Sincrotrone Trieste SCpA
  • Univerzitet u Sarajevu

Categories

Nanoparticles, Surface Plasmon Resonance, Gold

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