Data for: Plasma Nanotechnology for Controlling Chemical and Physical Properties of Organosilicon Nanocoatings

Published: 29-05-2020| Version 1 | DOI: 10.17632/nbwzz92s2w.1
Contributors:
Vladimir Cech,
Martin Branecky,
Naghmeh Aboualigaledari

Description

The data contains nanoindentation measurements and elliposmtric spectra.

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