Relative effects of pulsed laser deposition parameters on thin film stoichiometry
This is a spreadsheet for exploring the relative effects of ablation, plume expansion, and material condensation during the pulsed laser deposition of thin films. An ablation volume at the target material surface is considered with an area defined by the incident laser beam area and a thickness defined by the laser penetration depth. The spreadsheet is associated with a presentation at the 2022 International Conference on Metallurgical Coatings and Thin Films on the "Relative Effects of Pulsed Laser Deposition Parameters on the Stoichiometry of Thin Films," and with the conference paper to be published in Thin Solid Films.
Steps to reproduce
See instructions and comments in the spreadsheet.