Code and Processed Dataset for a Ring-Resolved Transfer Framework in DC Magnetron Sputtering

Description

This dataset contains the code and processed data supporting a ring-resolved transfer framework for DC magnetron sputtering. The deposited materials include processed magnetic-field data, ring-resolved target-ion incidence statistics obtained from PIC-MCC simulations, sputtered-source distributions, gas-phase transport outputs based on MC-Boltzmann modeling, substrate-arrival statistics, input parameter files, and post-processing scripts used to generate the figures reported in the associated manuscript. The framework is designed to preserve statistically consistent transfer from target-ion incidence to substrate-arrival boundary conditions under a unified ring-based spatial definition. Cu is treated as the reference target material, while Ti is included as a supplementary case for assessing methodological transferability. The deposited files correspond to the processed research outputs and code generated in this work. Publicly available external resources, including LXCat and NIST, were used as input sources for collision and reference data where appropriate, but are not redistributed as part of this dataset.

Steps to reproduce

To reproduce the analyses supported by this dataset, please follow these steps: 1. Download and extract the dataset package. 2. Read the README files for the folder structure, software requirements, and figure-to-file correspondence. 3. Use the processed magnetic-field and ring-partition data as the starting inputs for the target-side and transport-side analyses. 4. Use the ring-resolved target-ion incidence statistics together with the sputtered-source data to reconstruct source terms. 5. Use the transport outputs to reproduce the ring-to-ring redistribution analysis and substrate-arrival statistics. 6. Run the included post-processing and plotting scripts to regenerate the main tables and figures reported in the associated manuscript. The dataset contains processed data and analysis scripts sufficient to reproduce the principal reported results. Full raw simulation outputs are not included here because of file-volume constraints.

Institutions

• Zhengzhou University

  Henan, Zhengzhou

Categories

Licence