Data for Study of the chemical stability of precursors used for ALD of lithium-containing films by structural and thermal analyses

Name: Data for Study of the chemical stability of precursors used for ALD of lithium-containing films by structural and thermal analyses
Creator: Nicolas MASSONI
Published: 2026-05-23T14:27:06.946Z
Keywords: Gas Chromatography, X-Ray Spectroscopy, Thermal Analysis, Differential Scanning Calorimetry, Infra-Red Technique, Proton Nuclear Magnetic Resonance, 31P NMR Spectroscopy

MASSONI, Nicolas

doi:10.17632/2nnf32spcs.1

Data for Study of the chemical stability of precursors used for ALD of lithium-containing films by structural and thermal analyses

Published: 23 May 2026| Version 1 | DOI: 10.17632/2nnf32spcs.1

Contributor:

Nicolas MASSONI

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CEA Grenoble
Auvergne-Rhône-Alpes, Grenoble

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Agence Nationale de la Recherche
Paris

Data for Study of the chemical stability of precursors used for ALD of lithium-containing films by structural and thermal analyses

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