Data for inner-shell characteristic X-ray yields for thick Al、Ti、Zr、W、Au targets by 5-27 keV electrons
Description
The dataset presented here is supplemental material for our paper that was published in Acta Physica Sinica -Chinese Edition 69 (13) (2020) 133401 by Y.H. Li, et al. The dataset includes our measured inner-shell (K, Kα,β, and Lα,β,γ) characteristic X-ray yields for thick Al、Ti、Zr、W、Au targets by 5-27 keV electron impact. The surfaces of these (semi-infinite) thick targets were polished. The incident electron beam bombarded vertically, and the thick targets were tilted by 45° with respect to the direction of incident electron beam. The X-ray detector was placed horizontally, and the centers of the target and the detector are located in the same horizontal line. Therefore, the X-ray emission angle is 90° with respect to the incident beam direction, as shown in Figure 5 of Acta Physica Sinica -Chinese Edition 69 (13) (2020) 133401 by Y.H. Li, et al.