Data for: OPTICAL AND ELECTRICAL PROPERTIES OF Ti SUBOXIDES GROWN BY REACTIVE GRID-ASSISTED MAGNETRON SPUTTERING

Published: 31 March 2020| Version 1 | DOI: 10.17632/7kbbbjcgyy.1
Contributor:
Julio Sagás

Description

Data of X-Ray diffraction (XRD), X-Ray photoelectron spectroscopy (XPS) and spectrofotmetry of TiOx films deposited onto glass substrates by magnetron sputtering at different O2 concentrations on working gas flow rate.

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Categories

Applied Physics, Plasma, Thin Film, Magnetron Sputtering

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