Images and 3D print files for the vibrational polishing tool

Published: 23 May 2024| Version 1 | DOI: 10.17632/b2yyjhhzvd.1
Contributor:
Lawrence Whitmore

Description

Images and 3D print files for the 3D printed vibrational polishing tool

Files

Steps to reproduce

Files in the compressed file can be used to print the 3D polishing machine.

Institutions

Universitat Salzburg

Categories

Polishing, Chemical Mechanical Planarization

Funding

Austrian Science Fund

I-4782-N

Licence