Images and 3D print files for the vibrational polishing tool
Published: 23 May 2024| Version 1 | DOI: 10.17632/b2yyjhhzvd.1
Contributor:
Lawrence WhitmoreDescription
Images and 3D print files for the 3D printed vibrational polishing tool
Files
Steps to reproduce
Files in the compressed file can be used to print the 3D polishing machine.
Institutions
Universitat Salzburg
Categories
Polishing, Chemical Mechanical Planarization
Funding
Austrian Science Fund
I-4782-N