Annotated dataset of defect images for ceramic substrates
Description
Semiconductor technology is one of the most rapidly developing and widely applicable key technologies today. Ceramic substrates, characterized by their excellent physical and chemical properties such as resistance to high temperatures, high pressure, and various corrosive media including acids and alkalis, have become crucial components of semiconductor equipment. To ensure that each ceramic substrate meets design specifications, the inspection system must effectively detect various defects, as surface contaminants or scratches can lead to the production of non-compliant products and elevated defect rates [1].With the expanding market for electronic products and the increasing demand for semiconductors, the quality requirements for ceramic substrate production have risen significantly. The ability to detect even the most minute anomalies, including tiny trace cracks or surface contaminants, is essential for ensuring the performance, reliability, and safety of large-scale production lines.