Data for: Highly-doped SiC resonator with ultra-large tuning frequency range by Joule heating effect

Name: Data for: Highly-doped SiC resonator with ultra-large tuning frequency range by Joule heating effect
Creator: Pablo Guzman
Published: 2020-06-27T04:23:14.517Z
Keywords: Microelectromechanical System

Guzman, Pablo

doi:10.17632/mzttbrtkc3.1

Data for: Highly-doped SiC resonator with ultra-large tuning frequency range by Joule heating effect

Published: 27 June 2020| Version 1 | DOI: 10.17632/mzttbrtkc3.1

Contributor:

Pablo Guzman

Description

This data is the natural frequency, power applied (joule heating) and estimated temperature of a bridge MEMS resonotar.

Data for: Highly-doped SiC resonator with ultra-large tuning frequency range by Joule heating effect

Description

Files

Categories

Licence