Data for: Secondary electron emission characteristics of Al2O3 /MgO double-layer structure prepared by atomic layer deposition

Published: 25 December 2020| Version 1 | DOI: 10.17632/pjh6ymdf5f.1
Contributor:
Weiwei Cao

Description

fig.2-a and fig.2-b is MgO and Al2O3 XRD data EDS is the Al2O3/MgO double-layer EDS data Fig1 is the schematic of MgO and Al2O3 atomic layer deposition process

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Electron Devices, Nano-Coating

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