Data for: Development of a novel nickel-based metal force microsensor using bottom-up approach
Description
Measurement data behind the results of the article "Development of a novel nickel-based metal force microsensor using bottom-up approach" (W.J. Dera, H. Konopacka, D.M. Jarząbek, Precision Engineering 95 (2025) 251-261, https://doi.org/10.1016/j.precisioneng.2025.05.003). The sensor is a capacitive comb force microsensor made of nanocrystalline nickel by electrodeposition into a photoresist mould (bottom-up process). The dataset contains: - force-capacitance calibration (Fig. 7, Eq. 7): raw force of the reference transducer, raw AD7746 capacitance codes and every processing step (pairing, taring, time alignment, resampling, 5-sample moving average, trimming, linear fit); - force-displacement points used to determine the spring constant (Fig. 8a, Eq. 8); - capacitance drift under a constant load of about 2 N (Fig. 8b), raw codes and values in pF; - stability records of the reference force transducer at 1 N and 2 N (Fig. 9); - the screen capture of the capacitance anomaly between 3 and 5 N (Fig. 11) and microscope photographs of the out-of-plane rib deflection (Fig. 12); - the image files of all twelve figures of the article. README.txt describes every file, the columns and units, the instruments and the processing steps.
Files
Steps to reproduce
CSV files written for this dataset are comma-separated with a decimal point; original instrument exports (raw folders) are semicolon-separated with a decimal comma. AD7746 codes are converted to capacitance with C [pF] = (Code - 0x800000) / 0x800000 * 4.096. The Fig. 7 processing chain is given step by step (step1 ... step9); straight-line least-squares fits of step9_linear_fit_Fig7d.csv and force_displacement.csv give Eq. 7 and Eq. 8 of the article. See README.txt.
Institutions
- Institute of Fundamental Technological ResearchMazovia, Warsaw
Categories
Funders
- National Centre for Research and DevelopmentMinistry of Science and Higher EducationMazovia, WarsawGrant ID: TANGO-IV-B/0002/2019