Data for: Potassium Tartrate as a Complexing Agent for Chemical Mechanical Polishing of Cu/Co/TaN Barrier Liner Stack in H2O2 Based Alkaline Slurries

Published: 16 December 2019| Version 1 | DOI: 10.17632/v2wvzhs6bt.1
Contributors:
Guofeng Pan,
Jia Liu,
Lianjun Hu,
Shenghua Yang,
Can Li,
Ping He,
Xinbo Zhang

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Chemical Mechanical Planarization

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