Data for: Potassium Tartrate as a Complexing Agent for Chemical Mechanical Polishing of Cu/Co/TaN Barrier Liner Stack in H2O2 Based Alkaline Slurries
Published: 16 December 2019| Version 1 | DOI: 10.17632/v2wvzhs6bt.1
Contributors:guofeng pan, Jia Liu, Lianjun Hu, Chenwei Wang, Can Li, Ping He, Xinbo Zhang
All the data in this paper was included in this research file.
Chemical Mechanical Planarization