Data for: Bipolar HiPIMS for tailoring ion energies in thin film deposition

Name: Data for: Bipolar HiPIMS for tailoring ion energies in thin film deposition
Creator: Ulf Helmersson
Published: 2018-12-28T16:51:11.175Z
Keywords: Plasma

Helmersson, Ulf

doi:10.17632/xc89y4br4j.1

Data for: Bipolar HiPIMS for tailoring ion energies in thin film deposition

Published: 28 December 2018| Version 1 | DOI: 10.17632/xc89y4br4j.1

Contributor:

Ulf Helmersson

Description

Ion energy measurement for selected ions at different voltages applied in the reversed pulse.

Data for: Bipolar HiPIMS for tailoring ion energies in thin film deposition

Description

Files

Categories

Licence