Data for: Effect of Multi-functional Amines on SiGe Surface Finish During Chemical Mechanical Polishing.

Name: Data for: Effect of Multi-functional Amines on SiGe Surface Finish During Chemical Mechanical Polishing.
Creator: Baoguo Zhang
Published: 2019-04-22T22:50:48.928Z
Keywords: Chemical Mechanical Planarization

Zhang, Baoguo; Liu, Yuling; Wang, Chenwei; Wang, Ru; Yang, Shenghua; He, Yangang; Wang, Jianchao

doi:10.17632/xtdv7rtn5h.1

Data for: Effect of Multi-functional Amines on SiGe Surface Finish During Chemical Mechanical Polishing.

Published: 22 April 2019| Version 1 | DOI: 10.17632/xtdv7rtn5h.1

Contributors:

Baoguo Zhang, Yuling Liu, Chenwei Wang, Ru Wang, Shenghua Yang, Yangang He, Jianchao Wang

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This dataset contains the key measurement data, such as XRD, XPS and Raman spectroscopy.

Data for: Effect of Multi-functional Amines on SiGe Surface Finish During Chemical Mechanical Polishing.

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