Data for: Effect of Multi-functional Amines on SiGe Surface Finish During Chemical Mechanical Polishing.
Published: 22 April 2019| Version 1 | DOI: 10.17632/xtdv7rtn5h.1
Contributors:
Baoguo Zhang, Yuling Liu, Chenwei Wang, Ru Wang, Shenghua Yang, Yangang He, Jianchao WangDescription
This dataset contains the key measurement data, such as XRD, XPS and Raman spectroscopy.
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Categories
Chemical Mechanical Planarization